The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Sep. 08, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Michael Honan, Danvers, MA (US);
David Blahnik, Round Rock, TX (US);
Robert Brent Vopat, Austin, TX (US);
Jeffrey Blahnik, Volente, TX (US);
Charles Carlson, Cedar Park, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus and methods to process one or more wafers are described. The apparatus comprises a chamber defining an upper interior region and a lower interior region. A heater assembly is on the bottom of the chamber body in the lower interior region and defines a process region. A wafer cassette assembly is inside the heater assembly and a motor is configured to move the wafer cassette assembly from the lower process region inside the heater assembly to the upper interior region.