The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Dec. 30, 2021
Hon Hai Precision Industry Co., Ltd., New Taipei, TW;
Kuang-Hao Chiang, Taoyuan, TW;
HON HAI PRECISION INDUSTRY CO., LTD., New Taipei, TW;
Abstract
A manufacturing method of a semiconductor structure includes the following operations. A stacked structure is formed on a substrate. The stacked structure includes semiconductor layers and sacrificial layers that are alternately stacked, in which the sacrificial layers include germanium, and germanium concentrations of the sacrificial layers decrease from bottom to top. A dummy gate structure is formed on the stacked structure. A spacer is formed on both sides of the dummy gate structure. The dummy gate structure is removed, thereby forming an opening. The sacrificial layers are removed from the opening. A gate structure is formed to cover the semiconductor layers. In another manufacturing method, the stacked structure includes semiconductor layers and sacrificial layers that are alternately stacked, in which thicknesses of the semiconductor layers increase from bottom to top, or thicknesses of the sacrificial layers increase from bottom to top.