The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2025

Filed:

Feb. 17, 2023
Applicants:

Lnbs Co. Ltd., Busan, KR;

Jae Hak Lee, Seoul, KR;

Byunggeun Ahn, Busan, KR;

Joo Ho Lee, Seoul, KR;

Inventors:

Hyung Soo Ahn, Busan, KR;

Jae Hak Lee, Seoul, KR;

Byunggeun Ahn, Busan, KR;

Joo Ho Lee, Seoul, KR;

Assignees:

LNBS CO. LTD., Busan, KR;

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/08 (2006.01); C23C 16/06 (2006.01); C23C 16/24 (2006.01); C23C 16/30 (2006.01); C23C 16/32 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); C30B 25/10 (2006.01); C30B 25/14 (2006.01); C30B 29/06 (2006.01); C30B 29/08 (2006.01); C30B 29/16 (2006.01); C30B 29/36 (2006.01); C30B 29/40 (2006.01); C30B 29/52 (2006.01); C30B 29/62 (2006.01); C30B 29/66 (2006.01);
U.S. Cl.
CPC ...
C30B 25/08 (2013.01); C23C 16/06 (2013.01); C23C 16/24 (2013.01); C23C 16/303 (2013.01); C23C 16/325 (2013.01); C23C 16/40 (2013.01); C23C 16/455 (2013.01); C23C 16/46 (2013.01); C30B 25/10 (2013.01); C30B 25/14 (2013.01); C30B 29/06 (2013.01); C30B 29/08 (2013.01); C30B 29/16 (2013.01); C30B 29/36 (2013.01); C30B 29/403 (2013.01); C30B 29/52 (2013.01); C30B 29/62 (2013.01); C30B 29/66 (2013.01);
Abstract

An apparatus for manufacturing hexagonal crystals using HVPE includes: a reaction tube; a reaction boat disposed on one side in the reaction tube; a halogenation reaction gas supply pipe for supplying a halogenation reaction gas to the reaction boat; a nitrification reaction gas supply pipe for supplying a nitrification reaction gas to the reaction boat; and a heater for heating the reaction tube. The reaction boat includes a source part for receiving source materials; and a crystal growth part disposed beneath the source part and having a depressed growth mold of a predetermined shape. The source part includes: at least one penetration hole formed on a bottom surface; a first allocating area formed around the at least one penetration hole, for receiving aluminum; and a second allocating area formed around the first allocating area, for receiving a main material of the hexagonal crystal and gallium.


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