The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
May. 02, 2022
Picosun Oy, Espoo, FI;
Väinö Kilpi, Masala, FI;
Tom Blomberg, Masala, FI;
Picosun Oy, Espoo, FI;
Abstract
A substrate processing apparatus (), comprising a reaction chamber () having an upper portion () and a lower portion () sealing an inner volume of the reaction chamber () for substrate processing, the lower portion () being movable apart from the upper portion () to form a substrate loading gap therebetween, a substrate support system comprising a support table () and at least one support element () vertically movable in relation to the support table () and extending through the support table () to receive a substrate within the reaction chamber (), and a stopper () stopping a downward movement of the at least one support element () at a substrate loading level.