The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2025

Filed:

Aug. 24, 2021
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Ryo Nawata, Tochigi, JP;

Hiroyuki Sekiguchi, Tochigi, JP;

Takashi Shibayama, Tochigi, JP;

Yuma Onizawa, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/404 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); G05D 19/00 (2006.01); G05D 19/02 (2006.01); G06N 20/00 (2019.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
B29C 59/002 (2013.01); B29C 59/02 (2013.01); G05B 19/404 (2013.01); G05D 19/00 (2013.01); G05D 19/02 (2013.01); G06N 20/00 (2019.01); H01L 22/20 (2013.01);
Abstract

A control apparatus which controls a force applied to an object, includes a driver configured to apply the force to the object, an estimator configured to estimate, based on information related to a state of the object, an estimated value of a disturbance force to be applied to the object, a corrector configured to correct, based on the estimated value, a command value provided to the driver so as to reduce an influence of the disturbance force, and a determiner configured to execute processing for determining a plurality of parameter values to be used by the estimator to obtain the estimated value based on the information.


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