The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2025

Filed:

Sep. 29, 2021
Applicant:

Tsinghua University, Beijing, CN;

Inventors:

Lan Jiang, Beijing, CN;

Jianfeng Yan, Beijing, CN;

Jiaqun Li, Beijing, CN;

Assignee:

Tsinghua University, Beijing, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/0622 (2014.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 26/382 (2014.01); B23K 26/384 (2014.01);
U.S. Cl.
CPC ...
B23K 26/0624 (2015.10); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/083 (2013.01); B23K 26/382 (2015.10); B23K 26/384 (2015.10);
Abstract

Provided is a femtosecond laser system for processing a micro-hole array, comprising: a femtosecond laser, a half-wave plate, a polarizer, a concave lens, a convex lens, a diaphragm, a mechanical shutter, a phase-type spatial light modulator, a first plano-convex lens, a reflecting mirror, a second plano-convex lens, a dichroic mirror, a camera, a processing objective lens, a six-axis translation stage and a transmissive white light source.


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