The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2025
Filed:
Nov. 16, 2021
Applicant:
Sti Co., Ltd., Anseong-si, KR;
Inventors:
Assignee:
STI Co., Ltd., Anseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/02 (2006.01); B08B 13/00 (2006.01); F26B 3/04 (2006.01); F26B 3/30 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B08B 3/022 (2013.01); B08B 13/00 (2013.01); F26B 3/04 (2013.01); F26B 3/30 (2013.01); G03F 7/70925 (2013.01); B08B 2230/01 (2013.01);
Abstract
Proposed is a POD cleaning chamber including: a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD; a drying chamber including an exit door and drying the separations POD transferred from the cleaning sub-chamber; a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber.