The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 04, 2025

Filed:

Dec. 17, 2020
Applicant:

Viavi Solutions Inc., San Jose, CA (US);

Inventor:

Georg J. Ockenfuss, Santa Rosa, CA (US);

Assignee:

VIAVI Solutions Inc., Chandler, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); G01J 1/04 (2006.01); G01J 3/12 (2006.01); G01J 3/26 (2006.01); G01J 3/28 (2006.01); G01J 3/36 (2006.01); G01J 5/02 (2022.01); G01J 5/0802 (2022.01); G01J 5/0808 (2022.01); G01J 5/0831 (2022.01); G02B 5/20 (2006.01); G02B 5/26 (2006.01); G02B 5/28 (2006.01); H01L 31/0216 (2014.01);
U.S. Cl.
CPC ...
H01L 27/14621 (2013.01); G01J 1/0437 (2013.01); G01J 1/0492 (2013.01); G01J 3/26 (2013.01); G01J 3/2803 (2013.01); G01J 3/2823 (2013.01); G01J 3/36 (2013.01); G01J 5/0235 (2013.01); G01J 5/024 (2013.01); G01J 5/0802 (2022.01); G01J 5/0808 (2022.01); G01J 5/0831 (2013.01); G02B 5/201 (2013.01); G02B 5/26 (2013.01); G02B 5/285 (2013.01); H01L 31/02165 (2013.01); G01J 2003/1213 (2013.01); G01J 2003/1221 (2013.01); G01J 2003/2806 (2013.01); G01J 2003/2826 (2013.01);
Abstract

A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.


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