The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 04, 2025

Filed:

Jul. 26, 2022
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Brent Alan Anderson, Jericho, VT (US);

Lawrence A. Clevenger, Saratoga Springs, NY (US);

Christopher J. Penny, Saratoga Springs, NY (US);

Kisik Choi, Watervliet, NY (US);

Nicholas Anthony Lanzillo, Wynantskill, NY (US);

Robert Robison, Rexford, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5283 (2013.01); H01L 21/76804 (2013.01); H01L 21/76829 (2013.01); H01L 21/76834 (2013.01); H01L 21/7684 (2013.01); H01L 21/76877 (2013.01);
Abstract

Integrated chips include first lines, formed on an underlying substrate. Spacers are formed conformally on sidewalls of the plurality of lines. Etch stop remnants are positioned on the sidewalls of the plurality of lines, between the spacers and the underlying substrate. Second lines are formed on the underlying substrate, between respective pairs of adjacent first lines.


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