The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
May. 18, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Jeroen de Jonge, Almere, NL;
Sumit Sachdeva, Best, NL;
Lucian Jdira, Nieuw Vennep, NL;
Julien Laurentius Antonius Maria Keijser, Amersfoort, NL;
Theodorus G. M. Oosterlaken, Oudewater, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F27B 17/00 (2006.01); F27D 5/00 (2006.01); F27D 9/00 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F27B 17/0025 (2013.01); F27D 5/0037 (2013.01); H01L 21/67303 (2013.01); F27D 2009/0013 (2013.01);
Abstract
The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.