The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Jun. 25, 2021
Applicant:
Singulus Technologies Ag, Kahl am Main, DE;
Inventor:
Peter Weipert, Schöllkrippen, DE;
Assignee:
SINGULUS TECHNOLOGIES AG, Kahl am Main, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3447 (2013.01); C23C 14/3407 (2013.01); H01J 2237/0455 (2013.01); H01J 2237/0458 (2013.01);
Abstract
The present invention relates to a slit diaphragm, a slit diaphragm system comprising at least two slit diaphragms arranged adjacent to each other and to a coating module and coating facility comprising a slit diaphragm.