The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Apr. 04, 2022
Comet Technologies Usa, Inc., San Jose, CA (US);
Anthony Oliveti, San Jose, CA (US);
J. Kirkwood Rough, San Jose, CA (US);
COMET TECHNOLOGIES USA, INC., San Jose, CA (US);
Abstract
The present disclosure relates to a switching circuitry for a variable reactance matching network as may be used by plasma generation systems which utilize plasma for semiconductor processing. The switching circuitry may be used within a hybrid matching network that has a first-stage switched matching network and a second-stage mechanically-tuned matching network. The switching circuitry may also be used for variable reactance matching in telecom applications, plasma laser cutting applications, and/or RADAR/LIDAR implementations. The switching circuitry includes individual isolated power supplies that are fed from a main power supply. The individual isolated power supplies receive inductive power from a main power supply loop powered by the main power supply. The inductive coupling provides isolated power supply loops to drive circuitry for a single switch. Multiple instances of the isolated switch circuitry are used to receive a digital signal from a connected controller.