The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
May. 19, 2021
Jiangsu Leuven Instruments Co. Ltd, Xuzhou, CN;
Yaoyao Zhang, Xuzhou, CN;
Dongdong Hu, Xuzhou, CN;
Jun Zhang, Xuzhou, CN;
Na Li, Xuzhou, CN;
Haiyang Liu, Xuzhou, CN;
Shiran Cheng, Xuzhou, CN;
Song Guo, Xuzhou, CN;
Kaidong Xu, Xuzhou, CN;
JIANGSU LEUVEN INSTRUMENTS CO. LTD, Xuzhou, CN;
Abstract
An anti-breakdown ion source discharge apparatus includes a discharge chamber, a coil support, an upper insulation fixing block, a discharge component and an ion source chamber. The discharge component includes a radio-frequency coil, a lower conductive connector and an upper conductive connector. The radio-frequency coil is fixed on a coil support base; the coil support base is clamped on an inner wall of the bottom of the ion source base; the coil support is along the circumference of the coil support base; the radio-frequency coil passes through the coil support; the upper conductive connector passes by the radio-frequency coil and the coil support base from the outside of the radio-frequency coil and extends into the bottom of the discharge chamber; and the upper insulation fixing block is sleeved over the upper conductive connector and is fixed on the inner wall of the bottom of the ion source chamber.