The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Oct. 13, 2021
Rohm Co., Ltd., Kyoto, JP;
Yurina Amamoto, Kyoto, JP;
Shunsuke Akasaka, Kyoto, JP;
ROHM Co., LTD., Kyoto, JP;
Abstract
Provided is a sensor including a substrate that includes a major surface, a sensor part that includes a gas flow path formed of a porous material, and at least one of a heater or a temperature sensor. The heater is capable of heating the sensor part, the temperature sensor is capable of measuring temperature of the sensor part, the sensor part and the at least one of the heater or the temperature sensor are stacked over the major surface, the at least one of the heater or the temperature sensor is an interconnect having forward tapered side surfaces, and the at least one of the heater or the temperature sensor includes a metal interconnect layer, and the forward tapered side surfaces of the interconnect overlap with the gas flow path in plan view of the major surface.