The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
May. 29, 2019
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Suvi Haukka, Helsinki, FI;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); B32B 3/10 (2006.01); C01B 32/158 (2017.01); C01B 32/162 (2017.01); C23C 16/02 (2006.01);
U.S. Cl.
CPC ...
C01B 32/162 (2017.08); B32B 3/10 (2013.01); C01B 32/158 (2017.08); C23C 16/0209 (2013.01); C23C 16/0227 (2013.01); C23C 16/0281 (2013.01); C23C 16/26 (2013.01); Y10T 428/24802 (2015.01);
Abstract
Methods of forming carbon nanotubes and structures and devices including carbon nanotubes are disclosed. Methods of forming the carbon nanotubes include patterning a surface of a substrate with polymeric material, removing portions of the polymeric material to form exposed substrate surface sections, and forming the carbon nanotubes on the exposed substrate sections.