The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2025

Filed:

Dec. 24, 2020
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Daiki Ishii, Tokyo, JP;

Yoshihiko Yano, Tokyo, JP;

Yuki Yamashita, Tokyo, JP;

Kenichi Yoshida, Tokyo, JP;

Tetsuhiro Takahashi, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G 4/005 (2006.01); H01G 2/06 (2006.01); H01G 4/008 (2006.01); H01G 4/01 (2006.01); H01G 4/012 (2006.01); H01G 4/06 (2006.01); H01G 4/10 (2006.01); H01G 4/12 (2006.01); H01G 4/228 (2006.01); H01G 4/33 (2006.01); H01L 25/16 (2023.01); H01L 49/02 (2006.01); H05K 1/18 (2006.01); H01G 4/252 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 28/75 (2013.01); H01G 2/065 (2013.01); H01G 4/005 (2013.01); H01G 4/008 (2013.01); H01G 4/01 (2013.01); H01G 4/012 (2013.01); H01G 4/06 (2013.01); H01G 4/10 (2013.01); H01G 4/1209 (2013.01); H01G 4/1218 (2013.01); H01G 4/1254 (2013.01); H01G 4/228 (2013.01); H01G 4/33 (2013.01); H01L 25/16 (2013.01); H01L 28/84 (2013.01); H05K 1/18 (2013.01); H01G 4/252 (2013.01); H01L 24/16 (2013.01); H01L 2224/16227 (2013.01); H01L 2924/19015 (2013.01); H01L 2924/19041 (2013.01); H01L 2924/19102 (2013.01); H01L 2924/19103 (2013.01); H05K 2201/10015 (2013.01);
Abstract

To provide a thin film capacitor having high adhesion with respect to a circuit substrate. A thin film capacitor includes: a metal foil having a roughened upper surface; a dielectric film covering the upper surface of the metal foil and having an opening through which the metal foil is partly exposed; a first electrode layer contacting the metal foil through the opening; and a second electrode layer contacting the dielectric film without contacting the metal foil. An angle θa formed by the other main surface of the metal foil and a side surface thereof is more than 20° and less than 80°. The side surface is thus tapered at an angle of more than 20° and less than 80°, so that it is possible to suppress warpage and to enhance adhesion with respect to a multilayer substrate when the thin film capacitor is embedded in the multilayer substrate.


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