The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2025

Filed:

Aug. 07, 2024
Applicant:

Mico Ceramics Ltd., Anseong-si, KR;

Inventors:

So Young Park, Anseong si, KR;

Byung Gil Chun, Anseong si, KR;

Assignee:

MiCo Ceramics Ltd., Anseong-si, KR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B32B 15/04 (2006.01); B32B 15/20 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68757 (2013.01); B32B 15/04 (2013.01); B32B 15/20 (2013.01); H01L 21/6833 (2013.01); B32B 2307/7376 (2023.05);
Abstract

The present disclosure relates to a ceramic susceptor. In a method of manufacturing a base body of a ceramic susceptor of the present disclosure, which includes a lower plate and an upper plate, which are each made of a metal-ceramic composite and bonded to each other, the method includes: sequentially laminating a first active metal layer, a first aluminum layer, and a brazing filler layer on a bonding surface of the upper plate; sequentially laminating a second active metal layer and a second aluminum layer on a bonding surface of the lower plate; and brazing-bonding the lower plate and the upper plate with the brazing filler layer.


Find Patent Forward Citations

Loading…