The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Jun. 01, 2021
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Min Jung Park, Daegu, KR;
Jung Yul Lee, Cheongju-si, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); B05B 1/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/162 (2013.01); B05B 1/02 (2013.01); G03F 7/168 (2013.01);
Abstract
The inventive concept provides a method for treating a substrate. In the substrate treating method, a liquid film is formed by supplying a treatment liquid to the rotating substrate, and a wetting medium is sprayed in a form of fine particles to the substrate to help diffusion of the liquid film.