The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2025

Filed:

Dec. 08, 2021
Applicant:

3m Innovative Properties Company, St. Paul, MN (US);

Inventors:

Lucas J. Hunt, Nowthen, MN (US);

Ashley R. Sonnier, Minneapolis, MN (US);

James Zhu, Woodbury, MN (US);

Edwin L. Kusilek, Baldwin, WI (US);

Paul B. Armstrong, St. Paul, MN (US);

William B. Kolb, Stillwater, MN (US);

Caleb T. Nelson, McKinney, TX (US);

Jeffrey L. Solomon, Centerville, MN (US);

James M. Nelson, Lino Lakes, MN (US);

Samuel R. Hei, White Bear Township, MN (US);

David J. Tarnowski, Mahtomedi, MN (US);

Henrik B. van Lengerich, St. Paul, MN (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 59/00 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 59/002 (2013.01); H01L 21/027 (2013.01);
Abstract

Methods of forming an array of patterns on a substrate are provided. An array of protective tiles formed from a protectant resin is provided to cover an array of sub-regions on the substrate. An array of patterns is formed on the substrate by sequentially repeating steps (i) and (ii) for each sub-region: (i) removing the protective tile from one of the sub-regions to expose the first major surface underneath; and (ii) forming a pattern on the exposed first major surface within the one of the sub-regions.


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