The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Jan. 24, 2020
Applicant:
Julius-maximilians-universitat Wurzburg, Wurzburg, DE;
Inventors:
Enno Schatz, Wurzburg, DE;
Bert Hecht, Zell, DE;
Thien Anh Le, Wurzburg, DE;
Henriette Maass, Wurzburg, DE;
Assignee:
Julius-Maximilians-Universitat Wurzburg, Wurzburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01);
Abstract
Provided is a method and an apparatus of manufacturing nano-structures by cutting out portions of a material layer and removing the cut-out portions.