The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Sep. 25, 2019
Shenzhen Hypernano Optics Technology Co., Ltd, Shenzhen, CN;
Bin Guo, Shenzhen, CN;
SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD., Shenzhen, CN;
Abstract
A tunable optical filter device. The device comprises a first substrate () provided with a first reflective structure () and a thin film () provided with a second reflective structure (), the outer peripheries of the surfaces of the first substrate () and the thin film () having the reflective structures are mutually bonded by means of bonding compounds () so as to form a cavity between the reflective structures, and a piezoelectric thin film structure () is provided on a surface of the thin film () at the cavity side. The tunable optical filter device can avoid a pull-in effect caused by capacitor driving, thereby improving the movable range of the thin film (), and correspondingly expanding the tunable range of the spectrum of the Fabry-Perot cavity; in addition, the tunable optical filter device can be applied to a device with a limited size, such as a micro spectrometer, a miniaturized or even a mini-hyperspectral camera or a mobile phone.