The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Sep. 14, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Assignee:
Applied Materials, Inc.—Robotics, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/684 (2006.01); G01P 5/12 (2006.01);
U.S. Cl.
CPC ...
G01F 1/6845 (2013.01); G01P 5/12 (2013.01);
Abstract
Disclosed herein are embodiments of a sensor device, systems incorporating the same, and methods of fabricating the same. In one embodiment, a sensor device comprises a free-standing sensing element, such as a micro-electromechanical system (MEMS) device. The sensor device further comprises a metallic band to facilitate mounting the MEMS device to a mounting plate. The sensor device further comprises a conformal coating on a least a portion of a sensor region of the sensor device.
Merry, Nir. (2025). Micro-electromechanical device for use in a flow control apparatus (U.S. Patent No. 12235144). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12235144
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile