The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Sep. 18, 2020
Berkin B.v., Ruurlo, NL;
Wouter Sparreboom, Ruurlo, NL;
Jarno Groenesteijn, Ruurlo, NL;
Jack Herman Van Putten, Ruurlo, NL;
Meint Jelle De Boer, Ruurlo, NL;
Remco John Wiegerink, Ruurlo, NL;
Henk-Willem Veltkamp, Ruurlo, NL;
Qihui Yu, Ruurlo, NL;
Mahdieh Yariesbouei, Ruurlo, NL;
Miguel A. Rodriguez Olguin, Ruurlo, NL;
Joost Conrad Lötters, Ruurlo, NL;
BERKIN B.V., Ruurlo, NL;
Abstract
The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.