The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Apr. 27, 2018
Applicant:
Raytheon Company, Waltham, MA (US);
Inventors:
Amanda Rickman, Garland, TX (US);
James R. Smith, Princeton, TX (US);
Assignee:
RAYTHEON COMPANY, Waltham, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/00 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
B05D 1/60 (2013.01); C23C 16/46 (2013.01);
Abstract
Embodiments of the invention are directed to a deposition chamber for forming a poly-para-xylylene film. A non-limiting example of the deposition chamber includes a chamber body, an inlet coupling the chamber body to a furnace, and an outlet coupling the chamber body to a vacuum pump. The deposition chamber includes at least one heating element arranged on a surface of the chamber body. The heating element is configured to raise an internal temperature of the deposition chamber body to a substantially uniform internal temperature across an entire internal volume of the chamber body.