The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Oct. 03, 2022
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Atsushi Harikai, Osaka, JP;
Shogo Okita, Hyogo, JP;
Abstract
A plasma processing apparatus including: a chamber; a plasma generation unit configured to generate a plasma in the chamber; a stagefor placing a conveying carrier, the stage provided in the chamber; a coverfor covering at least part of the conveying carrier placed on the stage; a relative position change unit capable of changing a relative distance between the coverand the stageto a first distance and to a second distance smaller than the first distance; a determination unit configured to determine a placed state of the conveying carrier; and a control unit. The determination unit determines the placed state of the conveying carrier while the distance between the coverand the stageis the first distance, and the plasma processing is performed while the distance between the coverand the stageis the second distance.