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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12230457 B1

PDFFull Text
Date of Patent:
Feb. 18, 2025

Filed:

Apr. 07, 2022

Method for manufacturing a mems switch having an embedded metal contact

Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Jochen Reinmuth, Reutlingen, DE;

Matthew Lewis, Reutlingen, DE;

Peter Schmollngruber, Aidlingen, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorneys:

NORTON ROSE FULBRIGHT US LLP

Gerard A. Messina

Primary Examiner:

Younes Boulghassoul

Int. Cl.
CPC ...
H01H 1/00 (2006.01); H01H 1/06 (2006.01); H01H 11/00 (2006.01); H01H 11/06 (2006.01); H01H 59/00 (2006.01); H01L 21/3205 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01H 1/0036 (2013.01); H01H 1/06 (2013.01); H01H 11/00 (2013.01); H01H 11/06 (2013.01); H01H 59/0009 (2013.01); H01H 2001/0057 (2013.01); H01H 2001/0078 (2013.01); H01L 21/32051 (2013.01); H01L 21/76224 (2013.01);
Abstract

A MEMS switch that includes a substrate with a first insulating layer and a silicon layer thereabove, a fixed portion and a movable switching portion being formed in the silicon layer. A first metal layer is situated in recesses in the silicon layer at a side of the silicon layer facing away from the substrate, the first metal layer forming at least one switchable electrical contact between the fixed portion and the switching portion. A method for manufacturing a MEMS switch including at least one embedded metal contact is also described.

Find Patent Forward Citations

Reinmuth, Jochen. (2025). Method for manufacturing a mems switch having an embedded metal contact (U.S. Patent No. 12230457). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12230457

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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