The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Oct. 01, 2021
Edwards Japan Limited, Yachiyo, JP;
Manabu Nonaka, Yachiyo, JP;
Edwards Japan Limited, Yachiyo, JP;
Abstract
A vacuum exhaust system is provided which can reduce a size of a pump or a valve, and can thin the pipe diameter, and can perform highly efficient exhaust making the best use of exhaust characteristics of the pump from high vacuum to the large flow region. The process gas used in a vacuum chamber passes through a regulating valve, and reaches a first branch pipe. The passage on the side indicated with A in the drawing of the first branch pipe is connected with an inlet port of a second pump. On the other hand, the passage indicated with B in the drawing of the first branch pipe is provided with a bypass valve. Then, the downstream of an outlet port of the second pump and the downstream of the bypass valve are connected with a first pump via a second branch pipe. In the low and medium vacuum regions (at the time of large flow rate exhaust), the bypass valve is opened. At this time, the gas is exhausted through both the passage A including the second pump therethrough and a passage B. Then, when exhaust under medium and high vacuum conditions lower than that is performed, the bypass valve is closed, thereby performing exhaust through the passage A. As a result of this, the pipe of the passage B can be thinned.