The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Dec. 10, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Ala Moradian, San Jose, CA (US);
Umesh Madhav Kelkar, Cupertino, CA (US);
Elizabeth Neville, Sunnyvale, CA (US);
Orlando Trejo, Santa Clara, CA (US);
Sergey Meirovich, Austin, TX (US);
Kartik B. Shah, Saratoga, CA (US);
Shreyas Suresh Kher, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Technologies directed to an eco-efficiency monitoring and exploration platform for semiconductor manufacturing. One method includes receiving, by a processing device, first data indicating an update to a substrate fabrication system having a first configuration of manufacturing equipment and operating to one or more process procedures. The method further includes determining, by the processing device, using the first data with a digital replica, environmental resource data. The digital replica includes a digital reproduction of the substrate fabrication system. The environmental resource usage data indicates an environment resource consumption that corresponds to performing the one or more process procedures by the substrate fabrication system incorporating the update. The method further includes providing, by the processing device, the environmental resource usage data for display on a graphical user interface (GUI).