The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Nov. 09, 2021
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Ki Sang Eum, Cheonan-si, KR;
Jin Ho Choi, Incheon, KR;
Sun Wook Jung, Hwaseong-si, KR;
Byoung Doo Choi, Cheonan-si, KR;
Hee Man Ahn, Seoul, KR;
Si Eun Kim, Cheongju-si, KR;
Assignee:
SEMES Co., Ltd., Cheonan-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
G03F 7/162 (2013.01); C23C 16/4584 (2013.01);
Abstract
An apparatus for treating a substrate includes a treating vessel having an inner space, a support unit that supports and rotates the substrate in the inner space, and an exhaust unit that releases an air flow in the inner space. The exhaust unit includes an air-flow guide duct into which the air flow is introduced in a tangential direction with respect to a rotating direction of the substrate supported on the support unit.