The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2025

Filed:

Dec. 20, 2023
Applicant:

Supermag Technology (Shanghai) Co., Ltd., Shanghai, CN;

Inventors:

Guangyu Jiang, Shanghai, CN;

Chunsheng Cheng, Shanghai, CN;

Yue Zhao, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); B22F 10/28 (2021.01); B22F 12/41 (2021.01); B22F 12/53 (2021.01); B22F 12/55 (2021.01); B22F 12/90 (2021.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 40/00 (2020.01); B33Y 80/00 (2015.01); C23C 24/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); B22F 10/28 (2021.01); B22F 12/41 (2021.01); B22F 12/53 (2021.01); B22F 12/55 (2021.01); B22F 12/90 (2021.01); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 40/00 (2014.12); B33Y 80/00 (2014.12); C23C 24/087 (2013.01); B22F 2301/056 (2013.01); B22F 2301/10 (2013.01); B22F 2998/10 (2013.01);
Abstract

A preparation device for an alloy target includes a material nozzle, a high-energy laser, and a target support substrate, the material nozzle and the high-energy laser are respectively arranged above the target support substrate. The preparation device uses the material nozzle to spray the material powder required for the alloy target to be prepared, the injection efficiency is independently adjusted to achieve the purpose of non-fixed composition of the alloy target, and the spatial position and angle of the material nozzle are independently adjusted to ensure uniform composition and density of the target, the high-energy laser beam generated by the high-energy laser is used to heat the material powder in the spraying area to form a target coating of the required composition, the target support substrate is used to support the target coating formed by the material powder.


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