The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Apr. 20, 2021
Applicant:
The Regents of the University of Michigan, Ann Arbor, MI (US);
Inventors:
Stephen R. Forrest, Ann Arbor, MI (US);
Jeffrey A. Horowitz, Ann Arbor, MI (US);
Assignee:
The Regents of the University of Michigan, Innovation Partnerships, Ann Arbor, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); B05D 1/02 (2006.01); C23C 14/12 (2006.01); C23C 14/22 (2006.01); C23C 16/00 (2006.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01);
U.S. Cl.
CPC ...
C23C 14/228 (2013.01); B05D 1/02 (2013.01); C23C 14/12 (2013.01); C23C 16/00 (2013.01); C23C 14/042 (2013.01); H10K 71/00 (2023.02);
Abstract
Devices, systems, and techniques are provided for improved OVJP deposition using a shutter disposed within the OVJP print head, between the print head inlet and the nozzle outlets. An OVJP print head as disclosed includes an inlet for organic material entrained in a carrier gas, a micronozzle array outlet, and a shutter disposed in the gas flow path between the inlet and the micronozzle array outlet. The shutter allows for rapid cutoff of carrier gas flow through the print head with extremely low latency.