The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2025

Filed:

Apr. 14, 2020
Applicant:

Okinawa Institute of Science and Technology School Corporation, Okinawa, JP;

Inventors:

Stoffel Dominique Janssens, Okinawa, JP;

David Vazquez-Cortes, Okinawa, JP;

Alessandro Giussani, Okinawa, JP;

Eliot Martin Fried, Okinawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 17/22 (2006.01); C03C 15/00 (2006.01); C03C 23/00 (2006.01); C03C 25/6208 (2018.01);
U.S. Cl.
CPC ...
C03C 17/22 (2013.01); C03C 15/00 (2013.01); C03C 23/0025 (2013.01);
Abstract

Low-cost and robust platforms are key for the development of next-generation 3D micro- and nanodevices. To fabricate such platforms, nanocrystalline diamond (NCD) is a highly appealing material due to its biocompatibility, robustness, and mechanical, electrical, electrochemical, and optical properties, while glass substrates with through vias are ideal interposers for 3D integration due to the excellent properties of glass. A low-cost process—free of photolithography and transfer printing—for fabricating arrays of TGVs that are sealed with suspended portions of an ultra-thin NCD film on one side is presented. These highly transparent structures may serve as a platform for the development of microwells for single-cell culture and analysis, 3D integrated devices such as microelectrodes, and quantum technologies. It is also possible to replace the NCD with silicon nitride or silicon carbide, allowing for the development of complex heterogeneous structures on a small scale.


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