The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2025

Filed:

Oct. 19, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Rajkumar Thanu, Santa Clara, CA (US);

Jeffrey C. Hudgens, San Francisco, CA (US);

Damon K. Cox, Jarrell, TX (US);

Matvey Farber, Redwood City, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); B25J 11/00 (2006.01); B25J 21/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B25J 21/00 (2013.01); B25J 9/043 (2013.01); B25J 11/0095 (2013.01); H01L 21/67196 (2013.01);
Abstract

A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.


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