The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2025
Filed:
Dec. 11, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Hiram Cervera, Santa Clara, CA (US);
Yongan Xu, Santa Clara, CA (US);
Ludovic Godet, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/74 (2006.01); F27D 5/00 (2006.01); H05B 3/28 (2006.01); H05B 3/62 (2006.01);
U.S. Cl.
CPC ...
H05B 3/748 (2013.01); F27D 5/00 (2013.01); H05B 3/283 (2013.01); H05B 3/62 (2013.01);
Abstract
Embodiments of the present disclosure relate to bake apparatuses for handling and uniform baking of substrates and methods for the handling and the uniform baking of substrates. The bake apparatuses allow the substrates to be heated to a temperature greater than 50° C. without bowing of about 1 mm to about 2 mm from the edge of the substrates to the center of the substrates. The bake apparatuses heat the substrates uniformly or substantially uniformly to improve substrate quality.