The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2025
Filed:
Nov. 08, 2021
Sumitomo Chemical Company, Limited, Tokyo, JP;
Masahiko Shimada, Osaka, JP;
Koji Ichikawa, Osaka, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
Disclosed are a salt represented by formula (I), an acid generator and a resist composition: wherein Qand Qeach represent a fluorine atom or a perfluoroalkyl group; Rand Reach represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group; z represents an integer of 0 to 6; Xand Xeach represent *—CO—O—, *—O—CO—, etc.; Lrepresents a single bond or a hydrocarbon group which may have a substituent; Arepresents a group having a lactone structure which may have a substituent; Land Leach represent a single bond or an alkanediyl group; Rrepresents an iodine atom or a haloalkyl group; Rrepresents a halogen atom, a hydroxy group, a haloalkyl group or an alkyl group; m2 represents an integer of 0 to 4; and Zrepresents an organic cation.