The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 11, 2025

Filed:

May. 24, 2022
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Nobuaki Fujii, Kanagawa, JP;

Satoshi Nukushina, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 47/90 (2006.01); B65G 54/02 (2006.01); H01L 21/677 (2006.01); H02K 41/025 (2006.01);
U.S. Cl.
CPC ...
B65G 47/905 (2013.01); B65G 54/02 (2013.01); H01L 21/67709 (2013.01); H02K 41/025 (2013.01);
Abstract

A transport system includes: a mover on which a workpiece is mounted and which is movable in a first direction; a stator that has a plurality of coils arranged in the first direction and applies force to the mover by using the plurality of coils, the force transporting the mover in the first direction while floating the mover in a second direction crossing the first direction; a control unit that acquires a position and an attitude of the mover moving in the first direction while floating in the second direction and controls the current applied to the plurality of coils to control operation of the mover based on the acquired position and attitude; and a positioning part that limits the movement of the mover, wherein the positioning part includes a first positioning part that limits the movement of the mover in a direction of external force applied to the workpiece.


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