The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 11, 2025

Filed:

Oct. 16, 2020
Applicant:

Applied Materials, Inc, Santa Clara, CA (US);

Inventors:

Govindraj Desai, Karnataka, IN;

Sekar Krishnasamy, Bangalore, IN;

Sumedh Acharya, Bangalore, IN;

Dakshalkumar Patel, Gujarat, IN;

Jonathan Frankel, Los Gatos, CA (US);

Quoc Truong, San Ramon, CA (US);

Mario Cambron, San Jose, CA (US);

Ravindra Patil, Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); B01J 8/00 (2006.01); B01J 19/00 (2006.01); B05C 19/00 (2006.01); B05C 19/02 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
B01J 19/0066 (2013.01); B01J 8/0045 (2013.01); B05C 19/008 (2013.01); B05C 19/02 (2013.01); B05D 1/60 (2013.01); C23C 16/4417 (2013.01); B01J 8/0025 (2013.01);
Abstract

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.


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