The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
May. 04, 2022
Seiko Epson Corporation, Tokyo, JP;
Harunobu Koike, Matsumoto, JP;
Takanori Aimono, Matsumoto, JP;
Masao Nakayama, Shiojiri, JP;
Motoki Takabe, Shiojiri, JP;
Koji Sumi, Shiojiri, JP;
Yasuhiro Itayama, Kai, JP;
Toshihiro Shimizu, Fujimi, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.