The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Mar. 08, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Vijayabhaskara Venkatagiriyappa, Bangalore, IN;
Srinivas Ramakrishna, Bangalore, IN;
Mario Daniel Sanchez, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Lid separators for vacuum processing chamber lid separation and vacuum processing chambers incorporating same are provided herein. In some embodiments, a lid separator for a vacuum processing chamber includes: a shaft having a first end and an opposing second end, wherein the shaft is threaded along at least a first portion of the shaft; and a contact pad having an outer diameter greater than an outer diameter of the shaft, a recess disposed in a first side of the contact pad, and a central opening disposed through a second side of the contact pad, opposite the first side, and into the recess, wherein the shaft is coupled to the contact pad, wherein the first end of the shaft extends through the central opening and into the recess without reaching the first side of the contact pad, and wherein the first portion and the second end of the shaft extend away from the second side of the contact pad.