The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Oct. 28, 2022
Seiko Epson Corporation, Tokyo, JP;
Satoru Tanaka, Chino, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A physical quantity sensor includes: a first fixed electrode portion; a first movable electrode portion; a first fixed portion fixed to a substrate; a first support beam having one end coupled to the first fixed portion; a second support beam having one end coupled to the first fixed portion; and a first coupling portion coupling the other end of the first support beam and the other end of the second support beam to the first movable electrode portion. In a plan view in a third direction orthogonal to the substrate, the first movable electrode portion and the first fixed portion are disposed along a first direction, the first support beam and the second support beam are disposed along a second direction, and the first coupling portion includes a first portion disposed along the second direction side by side with the first support beam and the second support beam, and a second portion coupled to the first portion and the first movable electrode portion and disposed along the first direction.