The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2025

Filed:

Mar. 26, 2021
Applicant:

Pfeiffer Vacuum, Annecy, FR;

Inventors:

Bertrand Bellet, Annecy, FR;

Julien Bounouar, Annecy, FR;

Olivier Le Barillec, Annecy, FR;

Assignee:

PFEIFFER VACUUM, Annecy, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/26 (2006.01); G01N 1/22 (2006.01); G01N 33/00 (2006.01); G01N 1/24 (2006.01);
U.S. Cl.
CPC ...
G01N 1/26 (2013.01); G01N 1/2273 (2013.01); G01N 33/0011 (2013.01); G01N 2001/244 (2013.01);
Abstract

A measurement station for measuring airborne molecular contamination includes at least one gas analyser, at least two controllable isolation valves connected in parallel to the input of the at least one gas analyser, a conditioning pump, at least two calibrated orifices connected in parallel to the input of the conditioning pump, at least one distributor to connect each controllable isolation valve with, on one side, a sampling line and, on the other side, a calibrated orifice, and a control unit linked to the controllable isolation valves. The control unit commands the opening or the closing of the controllable isolation valves in order to be able to connect the at least one gas analyser with at least one sampling line.


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