The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Dec. 06, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chuang-Chia Lin, San Ramon, CA (US);
David Peterson, San Jose, CA (US);
Philip Allan Kraus, San Jose, CA (US);
Amir Bayati, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 19/00 (2006.01); G01N 29/02 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01);
U.S. Cl.
CPC ...
G01L 19/0092 (2013.01); H03H 9/02015 (2013.01); H03H 9/02574 (2013.01); H03H 9/14502 (2013.01); G01N 29/022 (2013.01); G01N 2291/014 (2013.01);
Abstract
Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.