The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2025

Filed:

Dec. 04, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Mohsin Waqar, Oakland, CA (US);

Paul Zachary Wirth, Kalispell, MT (US);

Todd James Brill, Denver, CO (US);

Paul Edward Fisher, Los Altos, CA (US);

Ilias Iliopoulos, Foster City, CA (US);

Charles Gregory Potter, Sr., Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); G01B 11/02 (2006.01); G01B 11/06 (2006.01); G01B 11/24 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 11/026 (2013.01); G01B 11/0608 (2013.01); G01B 11/0683 (2013.01); G01B 11/24 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); H01L 21/67739 (2013.01); H01L 21/68735 (2013.01); H01L 22/12 (2013.01); B25J 11/0055 (2013.01);
Abstract

Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.


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