The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Dec. 03, 2021
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Chris O'Brien, San Diego, CA (US);
Andrew Kay, Provo, UT (US);
Albert Cardona, Santa Barbara, CA (US);
Ventsislav Yantchev, Sofia, BG;
Patrick Turner, San Bruno, CA (US);
Robert B. Hammond, Santa Barbara, CA (US);
Dylan Kelly, San Diego, CA (US);
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Abstract
Methods of fabricating filter devices are disclosed. A back surface of a piezoelectric plate having a first thickness is attached to a substrate. The front surface of the piezoelectric plate is selectively etched to thin a portion of the piezoelectric plate from the first thickness to a second thickness less than the first thickness. Cavities are formed in the substrate such that portions of the piezoelectric plate form a plurality of diaphragms spanning respective cavities. A conductor pattern is formed on the front surface. The conductor pattern includes a first interdigital transducer (IDT) with interleaved fingers on a first diaphragm having the first thickness and a second IDT with interleaved fingers on a second diaphragm having the second thickness.