The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Oct. 25, 2019
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Hideji Naohara, Kyoto, JP;
Hiroaki Kakuma, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); H01L 21/6715 (2013.01); H01L 21/67253 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/10152 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A substrate processing apparatus processes a substrate. The substrate processing apparatus includes at least one processing unit that processes the substrate, first and second cameras that image different subject areas, and an association processing unit that generates association information indicating association between each of the subject areas and each of the first and second cameras by processing an image captured by each of the first and second cameras.