The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
May. 22, 2019
Applicant:
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Inventors:
Assignee:
Teknologian tutkimuskeskus VTT Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 15/06 (2024.01); G01N 15/02 (2006.01); G01N 15/00 (2006.01);
U.S. Cl.
CPC ...
G01N 15/0656 (2013.01); G01N 15/0266 (2013.01); G01N 2015/0046 (2013.01);
Abstract
According to an example aspect of the present invention, there is provided an apparatus comprising a microelectromechanical, MEMS, capacitor comprising two plates and a gap between the plates, a gas conveyor configured to cause gas to flow through the gap, and readout circuitry configured to measure a capacitance of the MEMS capacitor.