The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Aug. 21, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Xiaowei Wu, San Jose, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 14/08 (2006.01); C23C 16/455 (2006.01); C30B 29/16 (2006.01); C30B 29/68 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 23/29 (2006.01); H10N 60/85 (2023.01);
U.S. Cl.
CPC ...
C23C 16/405 (2013.01); C23C 14/083 (2013.01); C23C 16/403 (2013.01); C23C 16/45542 (2013.01); C30B 29/16 (2013.01); C30B 29/68 (2013.01); H01J 37/32477 (2013.01); H01L 21/02192 (2013.01); H01L 21/0228 (2013.01); H01L 21/67161 (2013.01); H01L 23/291 (2013.01); H10N 60/855 (2023.02);
Abstract
Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.