The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Apr. 30, 2021
Applicant:
Agc Inc., Tokyo, JP;
Inventors:
Assignee:
AGC Inc., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); C03C 3/06 (2006.01); C03C 21/00 (2006.01); G03F 1/22 (2012.01); G03F 1/52 (2012.01); G03F 1/54 (2012.01);
U.S. Cl.
CPC ...
C03C 15/00 (2013.01); C03C 3/06 (2013.01); C03C 21/007 (2013.01); G03F 1/22 (2013.01); G03F 1/52 (2013.01); G03F 1/54 (2013.01); C03C 2201/12 (2013.01); C03C 2201/42 (2013.01); C03C 2204/08 (2013.01);
Abstract
A glass substrate for EUVL includes a first main surface having a rectangular shape; a second main surface having a rectangular shape on an opposite side to the first main surface; four end surfaces orthogonal to the first and second main surfaces; four first chamfered surfaces formed on boundaries between the first main surface and the end surfaces; and four second chamfered surfaces formed on boundaries between the second main surface and the end surfaces. The glass substrate for EUVL is formed of quartz glass containing TiO. The end surfaces include fluorine (F) and an element (A) other than fluorine that forms a gas cluster with fluorine, and satisfy relations: