The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2025

Filed:

Oct. 30, 2015
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Choelmin Jang, Yongin-si, KR;

Dongkyun Ko, Yongin-si, KR;

Inkyo Kim, Yongin-si, KR;

Sukwon Jung, Yongin-si, KR;

Nam Ha, Yongin-si, KR;

Myungsoo Huh, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01); H10K 50/844 (2023.01); H10K 71/00 (2023.01); H10K 77/10 (2023.01);
U.S. Cl.
CPC ...
H10K 71/00 (2023.02); C23C 16/4412 (2013.01); C23C 16/45551 (2013.01); C23C 16/45563 (2013.01); C23C 16/54 (2013.01); H10K 50/844 (2023.02); H10K 50/8445 (2023.02); H10K 77/111 (2023.02);
Abstract

An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.


Find Patent Forward Citations

Loading…