The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2025
Filed:
Apr. 26, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Ryan T. Downey, San Jose, CA (US);
Hemant P. Mungekar, Campbell, CA (US);
James L'Heureux, Santa Clara, CA (US);
Andreas Neuber, Stuttgart, DE;
Michael W. Johnson, Austin, TX (US);
Joseph A. Van Gompel, Austin, TX (US);
Gino Gerardo Crispieri, Austin, TX (US);
Tony H. Tong, Dublin, CA (US);
Maxime Cayer, Chandler, AZ (US);
John L Koenig, Cedar Park, TX (US);
Mike M. Huang, Hsinchu, TW;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.